Taivo Jõgiaas "Mechanical properties of atomic layer deposited films and nanocomosites" | University of Tartu Institute of Physics
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Taivo Jõgiaas "Mechanical properties of atomic layer deposited films and nanocomosites"

Date: 
24.08.2017 - 13:15

Taivo Jõgiaas will defend his doctoral thesis titled "Mechanical properties of atomic layer deposited films and nanocomosites" on Thursday, 24 August at 13.15.

Supervisors:
Dr. Kaupo Kukli, Institute of Physics, University of Tartu
Dr. Aile Tamm, Institute of Physics, University of Tartu
Prof. Irina Hussainova, Tallinn University of Technology
 
Opponents: 
Prof. Riika Puurunen, Aalto University (Finland)
Dr. Tõnu Leemet, Estonian University of Life Sciences
 
Summary:
In this study atomic layer deposition combined with several other techniques was used to produce nanostructured composites. Three structure types were realized: fiber or particle filled and laminated structures. Mechanical properties (modulus and hardness) of composites were tested using instrumented nanoindentation. The results were analyzed in the context of several theoretical models where reasonable. Tests have shown that it is probably the easiest to prepare ALD laminated composites, where preparations were simple and compact sample was obtained without additional work techniques. The remaining types of structures likely need further research and optimization for best results. The elastic modulus measurements showed that the ALD films were not very rigid. For example, an amorphous Al2O3 was about 3 times less than the modulus of corundum-type Al2O3 (i. e. about 110 GPa versus ≈340 GPa). HfO2, Ta2O5, ZrO2 modules were also lower compared to bulk objects in macroscale. Elastic moduli of the composite laminates were intermediate between the values of the pure oxides, with the exception of ZrO2-Ta2O5 nanolaminates, in which case the moduli were larger compared to pure oxides. The exact causes of the phenomenon are still unaccounted for. The hardness of pure Al2O3 and HfO2 were nearly two times harder than soda-lime-glass (11–12 GPa and 6.7 GPa, respectively). Zirconium, and tantalum oxide were close to the hardness of glass (≈7 GPa). Results suggest that ALD oxide films are relatively hard materials and they could be matched to the different elastic moduli of other materials using various composite structures. The latter may be useful, for example, if it is desired to use the ALD films on metals or alloys (e.g. for corrosion protection). ALD films also allow to change mechanical properties of material surfaces that may be necessary in, for example, micro- or nanoelectromechanical (NEMS/MEMS) devices.
 

 

Location: 
Physicum - B103
URL: 
dspace.ut.ee/handle/10062/57137
Event category: